Kazlas P T, Johnson K M, McKnight D J
Opt Lett. 1998 Jun 15;23(12):972-4. doi: 10.1364/ol.23.000972.
A novel integrated assembly process for miniature liquid-crystal-on-silicon displays using photodefinable benzocyclobutene resin is presented. Spin coating speed defines the cell gap, photolithography defines the cell perimeter and spacers, and thermocompression bonding provides the adhesion. The photodefined adhesive spacers provide thin liquid-crystal cell gap control (<2.5 microm) with excellent uniformity (+/-100 nm) for glass-on-glass and glass-on-silicon assemblies. The resin is compatible with common liquid-crystal alignment films and exhibits a bonding shear strength of 22+/-3.2 MPa The assembly process flow and characterization of demonstration devices are described.
提出了一种使用可光定义的苯并环丁烯树脂的新型微型硅基液晶显示器集成组装工艺。旋涂速度决定了液晶盒间隙，光刻定义了液晶盒周长和间隔物，热压键合提供附着力。光定义的粘性间隔物可为玻璃对玻璃和玻璃对硅组件提供薄液晶盒间隙控制（<2.5微米），具有出色的均匀性（±100纳米）。该树脂与常见的液晶取向膜兼容，其键合剪切强度为22±3.2兆帕。描述了组装工艺流程和演示器件的特性。
