Kim Hwi, Lee Byoungho
National Creative Research Center for Active Plasmonics Applications Systems, Inter-University SemiconductorResearch Center and School of Electrical Engineering, Seoul National University, Gwanak-Gu Sinlim-Dong, Seoul 151-744, Korea.
J Opt Soc Am A Opt Image Sci Vis. 2008 Jan;25(1):40-54. doi: 10.1364/josaa.25.000040.
The pseudo-Fourier modal analysis of two-dimensional arbitrarily shaped grating structures is described. It is shown that the pseudo-Fourier modal analysis has an advantage of improved structure modeling over the conventional rigorous coupled-wave analysis. In the conventional rigorous coupled-wave analysis, grating structures are modeled by the staircase approximation, which is well known to have inherent significant errors under TM polarization. However, in the pseudo-Fourier modal analysis, such a limitation of the staircase approximation can be overcome through the smooth-structure modeling based on two-dimensional Fourier representation. The validity of the claim is proved with some comparative numerical results from the proposed pseudo-Fourier modal analysis and the conventional rigorous coupled-wave analysis.
描述了二维任意形状光栅结构的伪傅里叶模态分析。结果表明，与传统的严格耦合波分析相比，伪傅里叶模态分析在结构建模方面具有优势。在传统的严格耦合波分析中，光栅结构采用阶梯近似进行建模，众所周知，在TM偏振下这种近似存在固有的显著误差。然而，在伪傅里叶模态分析中，可以通过基于二维傅里叶表示的平滑结构建模来克服阶梯近似的这种局限性。通过所提出的伪傅里叶模态分析与传统严格耦合波分析的一些对比数值结果，证明了该说法的有效性。
