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使用倾斜指状叉指换能器的声表面波滤波器的自动计算机辅助设计。

Automatic computer-aided design of SAW filters using slanted finger interdigital transducers.

作者信息

Yatsuda H, Yamanouchi K

机构信息

Japan Radio Co., Ltd., 2-1-4 Fukuoka, Kamifukuoka, Saitama, 356-0011 Japan.

出版信息

IEEE Trans Ultrason Ferroelectr Freq Control. 2000;47(1):140-7. doi: 10.1109/58.818756.

Abstract

This paper describes a design procedure for surface acoustic wave (SAW) filters using slanted finger interdigital transducers (SFIT) that are suitable for mid-band or wideband applications. The SFITs cannot represent the impulse response directly, in contrast to apodized IDTs. A design method for SFITs based on a building-block approach in the frequency domain is described. An automatic computer-aided design tool for SFIT filters has been achieved. The SFIT filters can be designed using a withdrawal weighting for stop-band responses, an aperture weighting for pass-band amplitude responses, and a distance weighting for pass-band phase responses. In addition, a SFIT pattern for photo mask can be automatically designed using this tool. Using this tool, an SFIT filter with a relative bandwidth of 15% was designed on an x-cut 112y-direction LiTaO(3) substrate.

摘要

本文描述了一种适用于中频或宽带应用的、采用倾斜指型叉指换能器(SFIT)的表面声波(SAW)滤波器的设计流程。与切趾IDT不同,SFIT不能直接表示脉冲响应。文中介绍了一种基于频域积木法的SFIT设计方法。已开发出用于SFIT滤波器的自动计算机辅助设计工具。可使用用于阻带响应的抽头加权、用于通带幅度响应的孔径加权和用于通带相位响应的距离加权来设计SFIT滤波器。此外,使用该工具可自动设计用于光掩膜的SFIT图案。利用该工具,在x切112y方向的LiTaO(3)衬底上设计了一个相对带宽为15%的SFIT滤波器。

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