Nomura T, Takebayashi R, Saitoh A
Department of Electrical Communication, Shibaura Institute of Technology, Tokyo 108, Japan.
IEEE Trans Ultrason Ferroelectr Freq Control. 1998;45(5):1261-5. doi: 10.1109/58.726452.
A one-port surface acoustic wave (SAW) resonators incorporating Langmuir-Blodgett (LB) films has been investigated. SAW sensors are one potential applications of SAW devices. Most of the work reported on SAW sensor concerns delay lines. In this paper we characterize the mass loading effects of one-port resonators by depositing successive monolayers of LB films onto the surface. A 90 MHz SAW gas-phase sensor has been fabricated on an ST cut quartz substrate, and one-port resonator configurations have been used as the sensing element. Ultra thin monolayers of arachidic acid and arachidic acid ethyl ester have been deposited using the LB method. The resonant frequencies and the Q values have been measured as sensor response. Experimental results show that the Q values and the resonant frequencies of the one-port SAW resonator vary with film mass loading on the SAW device surface.
对一种包含朗缪尔-布洛杰特（LB）膜的单端口表面声波（SAW）谐振器进行了研究。SAW传感器是SAW器件的一种潜在应用。报道的关于SAW传感器的大多数工作都涉及延迟线。在本文中，我们通过在表面上依次沉积LB膜的单层来表征单端口谐振器的质量负载效应。在ST切割石英衬底上制作了一个90MHz的SAW气相传感器，并使用单端口谐振器配置作为传感元件。使用LB方法沉积了花生酸和花生酸乙酯的超薄单层。测量了谐振频率和Q值作为传感器响应。实验结果表明，单端口SAW谐振器的Q值和谐振频率随SAW器件表面的膜质量负载而变化。
