Yamagata S, Kawashima H
Asahikawa Campus, Hokkaido Univ. of Educ.
IEEE Trans Ultrason Ferroelectr Freq Control. 1999;46(5):1175-82. doi: 10.1109/58.796123.
We previously reported that the dynamic photo-elastic method was a very effective measuring technique for the stress distribution of vibrating quartz crystal resonators. The existence of a twisted asymmetrical vibration mode has been verified experimentally when the NS-GT cut quartz crystal resonator was vibrating in the main resonant frequency (MRF). A MRF and a sub-resonant frequency (SRF) of the NS-GT cut quartz resonator were defined as follows. If a mechanical standing wave was in the x' or y' direction of the resonator, the former was MRF vibration and the latter was SRF vibration, respectively. In this paper, stress distributions of two samples of the NS-GT cut quartz crystal resonator, one of which had a thickness of 80 mum and the other 150 mum, were measured by the dynamic photo-elastic method when the resonators were vibrating in each SRF. Thereafter, vibration modes of those resonators were estimated by the experimental data of stress distributions. We find that the vibration mode of the 80-mum resonator had a simple mechanical standing wave on the y' direction and the vibration mode of the 150-mum resonator was combined with a shearing mode in the SRF vibration. From the experiment, we decided that vibration modes of the NS-GT cut quartz crystal resonator were composed of the longitudinal stress T(3)' belonging to the z' direction of the plate and of the shearing stress T(5)' when the plate thickness was thickened and the resonator was oscillating in the SRF.
我们之前报道过,动态光弹性法是一种用于测量振动石英晶体谐振器应力分布的非常有效的技术。当NS-GT切型石英晶体谐振器在主谐振频率(MRF)下振动时,实验验证了扭曲非对称振动模式的存在。NS-GT切型石英谐振器的MRF和次谐振频率(SRF)定义如下。如果机械驻波在谐振器的x'或y'方向上,则前者分别为MRF振动,后者为SRF振动。在本文中,当谐振器在每个SRF下振动时,通过动态光弹性法测量了两个NS-GT切型石英晶体谐振器样品的应力分布,其中一个厚度为80μm,另一个厚度为150μm。此后,根据应力分布的实验数据估计了这些谐振器的振动模式。我们发现,80μm谐振器的振动模式在y'方向上有一个简单的机械驻波,而150μm谐振器的振动模式在SRF振动中与剪切模式相结合。通过实验,我们确定当板厚增加且谐振器在SRF下振荡时,NS-GT切型石英晶体谐振器的振动模式由属于板z'方向的纵向应力T(3)'和剪切应力T(5)'组成。