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基于ST切石英的声表面波同步谐振器设计

Design of SAW synchronous resonators on ST cut quartz.

作者信息

Soluch W

机构信息

Inst. of Electron. Mater. Technol., Warsaw.

出版信息

IEEE Trans Ultrason Ferroelectr Freq Control. 1999;46(5):1324-6. doi: 10.1109/58.796137.

Abstract

Surface acoustic wave (SAW) resonators on ST cut quartz, with synchronous placement of the interdigital transducers (IDT), were designed, fabricated, and measured. The basic structure of the resonators was a two-port one. The one-port resonators were obtained by parallel connection of the two IDT or by short circuiting one of them. The IDT were apodized to eliminate coupling to spurious modes. The transfer function of the two-port resonators was calculated by using the scattering matrix method. Several models of these resonators were investigated in the frequency range from about 300 to 715 MHz. By matching the theoretical and experimental transfer functions, the loss coefficient as a function of frequency and the SAW velocity in the reflector area as a function of aluminium layer thickness were determined. The responses of the resonators were free of any spurious modes.

摘要

设计、制造并测量了基于ST切石英的表面声波(SAW)谐振器,其叉指换能器(IDT)采用同步放置。谐振器的基本结构为两端口结构。单端口谐振器通过将两个IDT并联或使其中一个短路获得。对IDT进行了切趾处理以消除与杂散模式的耦合。采用散射矩阵法计算了两端口谐振器的传递函数。在约300至715 MHz的频率范围内研究了这些谐振器的几种模型。通过匹配理论和实验传递函数,确定了损耗系数随频率的变化以及反射器区域中SAW速度随铝层厚度的变化。谐振器的响应没有任何杂散模式。

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