用于测量长曲率半径的非准直双向剪切干涉仪。

Noncollimated bidirectional shearing interferometer for measuring a long radius of curvature.

作者信息

Lee Y W, Cho H M, Shin D J, Lee I W

机构信息

Quantum Metrology Division, Korea Research Institute of Standards and Science, P. O. Box 102, Yusong, Taejon, 305-600, South Korea.

出版信息

Appl Opt. 1997 Aug 1;36(22):5317-20. doi: 10.1364/ao.36.005317.

DOI:10.1364/ao.36.005317

PMID:18259348

Abstract

A method for measuring a long radius of curvature with a modified half-aperture bidirectional shearing interferometer is described. A plane mirror of the interferometer is replaced with a test mirror, and the incident beam is decollimated by shifting of the source to equalize the widths of the bidirectional shearing fringes reflected from the plane and test mirrors. This method can be applied to concave and convex surfaces.

摘要

描述了一种使用改进的半孔径双向剪切干涉仪测量长曲率半径的方法。将干涉仪的平面镜替换为测试镜，并通过移动光源使入射光束准直，以均衡从平面镜和测试镜反射的双向剪切条纹的宽度。该方法可应用于凹面和凸面。