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用于电子应用的多孔材料的设计与加工。

Design and processing of porous materials for electronic applications.

作者信息

Willoughby A F W

机构信息

Materials Research Group, University of Southampton, Highfield, Southampton SO17 1BJ, UK.

出版信息

Philos Trans A Math Phys Eng Sci. 2006 Jan 15;364(1838):175-87. doi: 10.1098/rsta.2005.1694.

Abstract

The use of porosity, either unintentionally or intentionally, in the fabrication of materials for electronic and optoelectronic applications is introduced. Unintentional uses include the fabrication of ceramic magnets, where high electrical resistivities are required to reduce eddy currents at high frequency, and the powder technology, often used, inevitably results in porosity. The generation of light from porous silicon created a huge impact in the early 1990s, followed by extensive work on the mechanism responsible, and has now been followed by a more balanced evaluation of its potential. Porous ferroelectrics have shown significant advantages over dense materials for positive temperature coefficient of resistance applications, and for sensors such as hydrophones, and these will be discussed. Low dielectric constant materials are required for the next generation of silicon integrated circuits, where a reduction compared with silicon dioxide is required, and here porosity is a convenient strategy. Finally, the use of deliberately engineered porous nanostructures, with dimensions in the range of the wavelength of light, are discussed for applications in optical processing.

摘要

介绍了在电子和光电子应用材料制造中无意或有意使用孔隙率的情况。无意的用途包括制造陶瓷磁体,在这种情况下需要高电阻率以减少高频下的涡流,而常用的粉末技术不可避免地会导致孔隙率。20世纪90年代初,多孔硅发光产生了巨大影响,随后对其产生机制进行了大量研究,现在人们对其潜力进行了更全面的评估。对于正温度系数电阻应用以及诸如水听器等传感器,多孔铁电体相对于致密材料已显示出显著优势,将对此进行讨论。下一代硅集成电路需要低介电常数材料,与二氧化硅相比需要降低介电常数,在此孔隙率是一种便捷的策略。最后,讨论了尺寸在光波长范围内的故意设计的多孔纳米结构在光学处理中的应用。

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