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用于垂直腔光电器件的金属薄膜的光学特性。

Optical properties of metallic films for vertical-cavity optoelectronic devices.

作者信息

Rakic A D, Djurisic A B, Elazar J M, Majewski M L

出版信息

Appl Opt. 1998 Aug 1;37(22):5271-83. doi: 10.1364/ao.37.005271.

Abstract

We present models for the optical functions of 11 metals used as mirrors and contacts in optoelectronic and optical devices: noble metals (Ag, Au, Cu), aluminum, beryllium, and transition metals (Cr, Ni, Pd, Pt, Ti, W). We used two simple phenomenological models, the Lorentz-Drude (LD) and the Brendel-Bormann (BB), to interpret both the free-electron and the interband parts of the dielectric response of metals in a wide spectral range from 0.1 to 6 eV. Our results show that the BB model was needed to describe appropriately the interband absorption in noble metals, while for Al, Be, and the transition metals both models exhibit good agreement with the experimental data. A comparison with measurements on surface normal structures confirmed that the reflectance and the phase change on reflection from semiconductor-metal interfaces (including the case of metallic multilayers) can be accurately described by use of the proposed models for the optical functions of metallic films and the matrix method for multilayer calculations.

摘要

我们展示了用于光电器件和光学器件中作为镜子和触点的11种金属的光学函数模型:贵金属(银、金、铜)、铝、铍以及过渡金属(铬、镍、钯、铂、钛、钨)。我们使用了两种简单的唯象模型,即洛伦兹 - 德鲁德(LD)模型和布伦德尔 - 博尔曼(BB)模型,来解释金属在0.1至6电子伏特的宽光谱范围内介电响应的自由电子部分和带间部分。我们的结果表明,需要BB模型来恰当地描述贵金属中的带间吸收,而对于铝、铍和过渡金属,这两种模型都与实验数据表现出良好的一致性。与垂直于表面结构的测量结果进行比较证实,通过使用所提出的金属薄膜光学函数模型和多层计算的矩阵方法,可以准确描述半导体 - 金属界面(包括金属多层膜的情况)反射时的反射率和反射相变。

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