En Naciri A, Johann L, Kleim R
Laboratoire de Physique des Liquides et Interfaces, 1 Boulevard Arago, CP 87811, 57078 Metz Cedex 3, France.
Appl Opt. 1999 Aug 1;38(22):4802-11. doi: 10.1364/ao.38.004802.
The extension of a spectroscopic ellipsometer that consists of a fixed polarizer, a rotating polarizer, a sample, and a fixed analyzer (PRPSE) to generalized ellipsometry to determining the generalized ellipsometric angles and the optical functions of an anisotropic medium is reported. The PRPSE configuration eliminates the polarization sensitivity of the light source. A general numerical technique has been derived to characterize the optical properties of the anisotropic material without intermediate generalized ellipsometric angles. The proposed method is experimentally verified for uniaxial mercuric iodide. The ordinary and the extraordinary refractive and absorption indices, respectively, N(o) = n(o)--ik(o) and N(e) = n(e)--ik(e), can be extracted directly from the Fourier coefficients measured by the PRPSE on a HgI(2) crystal face that contains the optical axis. The orientations of the optical axis with respect to the plane of incidence were also determined by direct analysis of the measured Fourier coefficients. Measurements were made of reflection across a spectral range of 1.5-4.13 eV at one angle of incidence (Phi = 70 degrees ) for several azimuths phi of the optical axis with respect to the plane of incidence. The generalized ellipsometric angles were obtained from numerical inversion by changes of both polarizer and analyzer azimuth angles P and A.
报道了一种由固定偏振器、旋转偏振器、样品和固定分析器组成的光谱椭偏仪（PRPSE）扩展到广义椭偏测量，用于确定各向异性介质的广义椭偏角和光学函数。PRPSE配置消除了光源的偏振敏感性。已经推导了一种通用的数值技术，用于表征各向异性材料的光学特性，而无需中间广义椭偏角。所提出的方法已通过对单轴碘化汞的实验验证。寻常和非寻常折射及吸收指数，分别为N(o)=n(o)-ik(o)和N(e)=n(e)-ik(e)，可直接从PRPSE在包含光轴的HgI₂晶面上测量的傅里叶系数中提取。光轴相对于入射平面的取向也通过对测量的傅里叶系数的直接分析来确定。在一个入射角（Phi = 70度）下，针对光轴相对于入射平面的几个方位角phi，在1.5 - 4.13 eV的光谱范围内进行了反射测量。通过改变偏振器和分析器方位角P和A进行数值反演，获得了广义椭偏角。
