用于阶跃轮廓测量的带超发光二极管的正弦波长扫描干涉仪。

Sinusoidal wavelength-scanning interferometer with a superluminescent diode for step-profile measurement.

作者信息

Sasaki O, Murata N, Suzuki T

机构信息

Faculty of Engineering, Niigata University, 8050 Ikarashi 2, Niigata-shi 950-2181, Japan.

出版信息

Appl Opt. 2000 Sep 1;39(25):4589-92. doi: 10.1364/ao.39.004589.

DOI:10.1364/ao.39.004589

PMID:18350047

Abstract

In sinusoidal phase-modulating interferometry an optical path length (OPD) larger than a wavelength is measured by detection of sinusoidal phase-modulation amplitude Z(b) of the interference signal that is produced by sinusoidal scanning of the wavelength of a light source. A light source with a large scanning width of wavelength is created by use of a superluminescent laser diode for the error in the measured value obtained by Z(b) to be smaller than half of the central wavelength. In this situation the measured value can be combined with a fractional value of the OPD obtained from the conventional phase of the interference signal. A sinusoidal wavelength-scanning interferometer with the light source measures an OPD over a few tens of micrometers with a high accuracy of a few nanometers.

摘要

在正弦相位调制干涉测量法中，通过检测由光源波长的正弦扫描产生的干涉信号的正弦相位调制幅度Z(b)，来测量大于一个波长的光程差（OPD）。通过使用超发光激光二极管创建具有大波长扫描宽度的光源，以使由Z(b)获得的测量值误差小于中心波长的一半。在这种情况下，测量值可以与从干涉信号的常规相位获得的OPD分数值相结合。配备该光源的正弦波长扫描干涉仪能够以几纳米的高精度测量几十微米的光程差。