Sasaki O, Sasazaki H, Suzuki T
Appl Opt. 1991 Oct 1;30(28):4040-5. doi: 10.1364/AO.30.004040.
We describe a two-wavelength laser-diode interferometer that is insensitive to external disturbances such as fluctuations in the wavelength of the laser diode and mechanical vibrations of the optical components. In sinusoidal phase-modulating interferometry this insensitivity is easily obtained by controlling the injection current of the laser diode with a feedback control system. Using an equivalent wavelength of 152 microm provided by two single-frequency laser diodes, we can measure the distance, rotation angle, and surface profile measurements with great accuracy.
我们描述了一种双波长激光二极管干涉仪，它对诸如激光二极管波长波动和光学元件机械振动等外部干扰不敏感。在正弦相位调制干涉测量法中，通过使用反馈控制系统控制激光二极管的注入电流，很容易实现这种不敏感性。利用两个单频激光二极管提供的152微米等效波长，我们能够高精度地测量距离、旋转角度和表面轮廓。
