Zhu Y, Gemma T
Appl Opt. 2001 Sep 1;40(25):4540-6. doi: 10.1364/ao.40.004540.
We propose a general approach to eliminating some error source effects in phase-calculation algorithms for phase-shifting interferometry. We express the actual phase shift in a convenient form that takes the errors into account and develop in series the detected phase from a generic algorithm. Setting to zero the terms of the series that involve unwanted errors leads to a set of linear equations for the algorithm coefficients, which can thus be found. By using this approach, one could develop an algorithm series for an individual interferometer based on relevant concerns about the main error sources in it and eliminate the error source effects to any desired order. Two examples of algorithm series, to eliminate distorted phase shifts caused by the geometric effect in an interferometer with a spherical Fizeau cavity and to eliminate vibration effects, are discussed.
我们提出了一种通用方法，用于消除相移干涉术中相位计算算法中的一些误差源影响。我们以一种方便的形式表示实际相移，该形式考虑了误差，并从通用算法中对检测到的相位进行级数展开。将涉及不需要误差的级数项设为零，会得到一组关于算法系数的线性方程，从而可以求出这些系数。通过使用这种方法，可以根据对单个干涉仪中主要误差源的相关关注，开发出一个算法系列，并将误差源影响消除到任何所需的阶数。讨论了两个算法系列的例子，一个是消除具有球形斐索腔的干涉仪中由几何效应引起的失真相移，另一个是消除振动效应。
