Teo Selin H G, Liu A Q, Zhang J B, Hong M H, Singh J, Yu M B, Singh N, Lo G Q
Institute of Microelectronics, 11 Science Park Road, Singapore.
Opt Express. 2008 May 26;16(11):7842-8. doi: 10.1364/oe.16.007842.
Ultrafast high-density photonic integrated circuit devices (PICDs) are not easily obtained using traditional index-guiding mechanisms. In this paper, photonic bandgap crystal resonator enhanced, laser-controlled modulations of optical interconnect PICDs were achieved in slab-type mix-guiding configuration - through developed CMOS-compatible processing technologies. The devices, with smallest critical dimensions of 90 nm have footprints of less than 5 x 5 microm(2). Quality-factors an order larger than previously realized was achieved. Through use of effective coupling structures; simultaneous alignment for probing and pumping laser beams, optical measurements of both instantaneous free carriers induced device modulations were obtained together with thermo-optical effects characterizations.
使用传统的折射率引导机制很难获得超快高密度光子集成电路器件（PICD）。在本文中，通过已开发的与CMOS兼容的处理技术，在平板型混合引导配置中实现了光子带隙晶体谐振器增强的、激光控制的光互连PICD调制。这些器件的最小临界尺寸为90纳米，占地面积小于5×5微米²。实现了比以前更高一个数量级的品质因数。通过使用有效的耦合结构；同时对准探测和泵浦激光束，获得了对瞬时自由载流子诱导的器件调制的光学测量以及热光效应表征。
