Kuo Chiung-Wen, Wei Kung Hwa, Lin Chun-Hsun, Shiu Jau-Ye, Chen Peilin
Department of Material Science and Engineering, National Chiao Tung University, Hsin Chu, Taiwan.
Electrophoresis. 2008 Jul;29(14):2931-8. doi: 10.1002/elps.200700943.
Here, we describe a simple and low-cost lithographic technique to fabricate size-controllable nanopillar arrays inside the microfluidic channels for the studies of single DNA molecules. In this approach, nanosphere lithography has been employed to grow a single layer of well-ordered close-packed colloidal crystals inside the microfluidic channels. The size of the polymeric colloidal nanoparticles could be trimmed by oxygen plasma treatment. These size-trimmed colloidal nanoparticles were then used as the etching mask in a deep etching process. As a result, well-ordered size-controllable nanopillar arrays could be fabricated inside the microfluidic channels. The gap distance between the nanopillars could be tuned between 20 and 80 nm allowing the formation of nanofluidic system where the behavior of a single lambda-phage DNA molecule has been investigated. It was found that the lambda-phage DNA molecule could be fully stretched in the nanofluidic system formed by nanopillars with 50 nm gap distance at a field of 50 V/cm.
在此,我们描述了一种简单且低成本的光刻技术,用于在微流控通道内制造尺寸可控的纳米柱阵列,以用于单DNA分子的研究。在这种方法中,已采用纳米球光刻技术在微流控通道内生长单层有序密堆积的胶体晶体。聚合物胶体纳米颗粒的尺寸可以通过氧等离子体处理进行修整。然后,这些尺寸修整后的胶体纳米颗粒在深蚀刻过程中用作蚀刻掩膜。结果,可以在微流控通道内制造出有序的、尺寸可控的纳米柱阵列。纳米柱之间的间隙距离可以在20至80纳米之间调节,从而形成纳米流体系统,在该系统中对单个λ噬菌体DNA分子的行为进行了研究。研究发现,在50 V/cm的电场下,λ噬菌体DNA分子可以在由间隙距离为50纳米的纳米柱形成的纳米流体系统中完全伸展。