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通过原子力显微镜对柔顺材料的压痕硬度和模量进行定量测量。

Quantitative measurement of indentation hardness and modulus of compliant materials by atomic force microscopy.

作者信息

Passeri D, Bettucci A, Biagioni A, Rossi M, Alippi A, Lucci M, Davoli I, Berezina S

机构信息

Dipartimento di Energetica, Universita di Roma La Sapienza, Rome, Italy.

出版信息

Rev Sci Instrum. 2008 Jun;79(6):066105. doi: 10.1063/1.2949387.

DOI:10.1063/1.2949387
PMID:18601441
Abstract

An atomic force microscopy (AFM) based technique is proposed for the characterization of both indentation modulus and hardness of compliant materials. A standard AFM tip is used as an indenter to record force versus indentation curves analogous to those obtained in standard indentation tests. In order to overcome the lack of information about the apex geometry, the proposed technique requires calibration using a set of reference samples whose mechanical properties have been previously characterized by means of an independent technique, such as standard indentation. Due to the selected reference samples, the technique has been demonstrated to allow reliable measurements of indentation modulus and hardness in the range of 0.3-4.0 GPa and 15-250 MPa, respectively.

摘要

提出了一种基于原子力显微镜(AFM)的技术,用于表征柔性材料的压痕模量和硬度。使用标准AFM探针作为压头来记录力与压痕曲线,类似于在标准压痕测试中获得的曲线。为了克服关于尖端几何形状信息的不足,所提出的技术需要使用一组参考样品进行校准,这些参考样品的机械性能先前已通过独立技术(如标准压痕)进行了表征。由于选择了参考样品,已证明该技术能够分别可靠地测量0.3 - 4.0 GPa和15 - 250 MPa范围内的压痕模量和硬度。

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