Badoil Bruno, Lemarchand Fabien, Cathelinaud Michel, Lequime Michel
Laboratoire Institut Fresnel, Université Paul Cézanne, 13388 Marseille cedex 20, France.
Opt Express. 2008 Aug 4;16(16):12008-17. doi: 10.1364/oe.16.012008.
This paper deals with a broadband optical monitoring set up useful for the manufacturing of absorbing coatings. The monitoring strategy consists in simultaneous measurements of transmittance and reflectance over a large spectral range. The resulting analysis allows then to determine the real time deposited thickness. A stage of design correction is possible after the deposition and analysis of each layer. This method has potential for thin metallic layers coatings. We then describe layer after layer the strategy for the control and manufacturing of a filter with given colorimetric properties.
本文介绍了一种适用于吸收涂层制造的宽带光学监测装置。监测策略包括在大光谱范围内同时测量透过率和反射率。由此产生的分析能够确定实时沉积厚度。在每一层沉积和分析之后，可以进行设计校正阶段。这种方法对薄金属层涂层具有应用潜力。然后我们逐层描述具有给定比色特性的滤光片的控制和制造策略。
