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基于混合纳米氧化钨的厚膜半导体传感器对液化石油气的检测

Detection of liquid petroleum gas using mixed nanosized tungsten oxide-based thick-film semiconductor sensor.

作者信息

Chaudhari G N, Bende A M, Bodade A B, Patil S S, Manorama S V

机构信息

Gas Sensor and Thin Films Laboratory, Department of Chemistry, Shri Shivaji Science College, Amravati, Maharashtra, India.

出版信息

Talanta. 2006 Mar 15;69(1):187-91. doi: 10.1016/j.talanta.2005.09.024. Epub 2005 Oct 19.

Abstract

The thick-film semiconductor sensor for liquid petroleum gas (LPG) detection was fabricated using a mixed WO(3)-based sensor. We present the characterization of both their structural properties by means of XRD measurements and the electrical characteristics by using gas-sensing properties. The sensing characteristics such as sensitivity, working range, cross-sensitivity and response time were studied by using nanosized WO(3)-based mixed with different metal oxides (SnO(2), TiO(2) and In(2)O(3)) and doped with noble metals (Au, Pd and Pt). The WO(3)-based mixed with 5 wt.% In(2)O(3) and 0.5 wt.% Pd showed the higher sensing characteristic at low concentration of LPG sensor at an operating temperature 225 degrees C.

摘要

用于检测液化石油气(LPG)的厚膜半导体传感器是使用基于WO(3)的混合传感器制造的。我们通过X射线衍射测量来表征其结构特性,并利用气敏特性来表征其电学特性。通过使用与不同金属氧化物(SnO(2)、TiO(2)和In(2)O(3))混合并掺杂贵金属(Au、Pd和Pt)的纳米级WO(3),研究了诸如灵敏度、工作范围、交叉敏感性和响应时间等传感特性。与5 wt.% In(2)O(3)和0.5 wt.% Pd混合的WO(3)在225摄氏度的工作温度下,对低浓度LPG传感器表现出更高的传感特性。

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