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用于石英谐振器上电极薄膜的专用有限元

Dedicated finite elements for electrode thin films on quartz resonators.

作者信息

Srivastava Sonal A, Yong Yook-Kong, Tanaka Masako, Imai Tsutomu

机构信息

Dept. of Civil & Environ. Eng., Rutgers Univ., Piscataway, NJ, USA.

出版信息

IEEE Trans Ultrason Ferroelectr Freq Control. 2008 Aug;55(8):1686-97. doi: 10.1109/TUFFC.2008.854.

Abstract

The accuracy of the finite element analysis for thickness shear quartz resonators is a function of the mesh resolution; the finer the mesh resolution, the more accurate the finite element solution. A certain minimum number of elements are required in each direction for the solution to converge. This places a high demand on memory for computation, and often the available memory is insufficient. Typically the thickness of the electrode films is very small compared with the thickness of the resonator itself; as a result, electrode elements have very poor aspect ratios, and this is detrimental to the accuracy of the result. In this paper, we propose special methods to model the electrodes at the crystal interface of an AT cut crystal. This reduces the overall problem size and eliminates electrode elements having poor aspect ratios. First, experimental data are presented to demonstrate the effects of electrode film boundary conditions on the frequency-temperature curves of an AT cut plate. Finite element analysis is performed on a mesh representing the resonator, and the results are compared for testing the accuracy of the analysis itself and thus validating the results of analysis. Approximations such as lumping and Guyan reduction are then used to model the electrode thin films at the electrode interface and their results are studied. In addition, a new approximation called merging is proposed to model electrodes at the electrode interface.

摘要

厚度剪切石英谐振器有限元分析的精度是网格分辨率的函数;网格分辨率越高,有限元解越精确。为使解收敛,每个方向都需要一定数量的最小单元。这对计算内存要求很高,而且可用内存常常不足。通常,电极薄膜的厚度与谐振器本身的厚度相比非常小;因此,电极单元的纵横比很差,这对结果的准确性不利。在本文中,我们提出了特殊方法来对AT切晶体的晶体界面处的电极进行建模。这减小了整体问题规模,并消除了纵横比差的电极单元。首先,给出实验数据以证明电极薄膜边界条件对AT切板频率-温度曲线的影响。在表示谐振器的网格上进行有限元分析,并比较结果以测试分析本身的准确性,从而验证分析结果。然后使用诸如集中和Guyan缩减等近似方法对电极界面处的电极薄膜进行建模,并研究其结果。此外,还提出了一种称为合并的新近似方法来对电极界面处的电极进行建模。

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