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通过等效电路表示法对聚合物涂层声表面波谐振器的电响应进行建模。

Modeling electrical response of polymer-coated SAW resonators by equivalent circuit representation.

机构信息

Department of Physics and Astrophysics, University of Delhi, Delhi 110 007, India.

出版信息

Ultrasonics. 2011 Jul;51(5):547-53. doi: 10.1016/j.ultras.2010.12.006. Epub 2010 Dec 20.

DOI:10.1016/j.ultras.2010.12.006
PMID:21236460
Abstract

The paper presents an equivalent circuit model of the polymer coated surface acoustic wave (SAW) resonators by combining coupling-of-mode (COM) description of SAW resonators and perturbation calculation of SAW propagation under polymer loading. An expression for the motional load produced by polymer coating is deduced in terms of COM parameters and polymer characteristics. In addition, expressions for the shifts in resonance frequency and attenuation due to polymer loading are obtained. Simulation results are presented for one-port and two-port resonator devices coated with viscoelastic thin polymer film. The influence of polymer film on resonator response is studied with regard to variations in film thickness and shear modulus. The model simplifies understanding of polymer-coated SAW sensors.

摘要

本文通过结合表面声波(SAW)谐振器的耦合模式(COM)描述和聚合物加载下 SAW 传播的微扰计算,提出了聚合物涂层表面声波(SAW)谐振器的等效电路模型。根据 COM 参数和聚合物特性,推导出了聚合物涂层产生的运动负载的表达式。此外,还得到了由于聚合物加载而引起的共振频率和衰减的偏移表达式。对涂有黏弹性薄聚合物膜的单端口和双端口谐振器器件进行了仿真。研究了聚合物膜的厚度和剪切模量的变化对谐振器响应的影响。该模型简化了对聚合物涂层 SAW 传感器的理解。

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Micromachines (Basel). 2021 Mar 14;12(3):303. doi: 10.3390/mi12030303.