Woo Do-Kyun, Hane Kazuhiro, Lee Sun-Kyu
Department of Mechatronics, Gwangju Institute of Science and Technology (GIST), Gwangju 500-712, Republic of Korea.
Opt Express. 2008 Dec 8;16(25):21004-11. doi: 10.1364/oe.16.021004.
This paper presents a noble diffractive grating so as to achieve high diffraction order. A v-shaped groove transmission grating with reflective and refractive surfaces (VGRRS) is proposed. Design, fabrication, and optical testing of the VGRRS are described. This grating is simulated by Rigorous coupled-Wave analysis (RCWA) for TE mode and fabricated by thermal evaporation on the replica which is obtained through a hot-embossing process using a v-shaped groove mold. The most important property of VGRRS is to conduct a high diffraction order at visible wavelengths. When used at the wavelength of 406 nm, the VGRRS can strongly have two high diffracted lights in terms of -4th and -10th transmission diffraction orders.
本文提出了一种新型衍射光栅以实现高衍射级次。提出了一种具有反射和折射表面的V形槽透射光栅（VGRRS）。描述了VGRRS的设计、制作和光学测试。该光栅通过严格耦合波分析（RCWA）对TE模式进行模拟，并通过热蒸发在使用V形槽模具通过热压印工艺获得的复制品上制作。VGRRS最重要的特性是在可见波长下实现高衍射级次。当在406nm波长下使用时，VGRRS在-4级和-10级透射衍射级次方面可以强烈地产生两束高衍射光。
