Rakocevic Z, Petrovic R, Strbac S
Laboratory of Atomic Physics, INS Vinca, PO Box 522, 11001 Belgrade, Serbia.
J Microsc. 2008 Dec;232(3):595-600. doi: 10.1111/j.1365-2818.2008.02123.x.
Silver was sputter deposited on a glass with a thin film thickness ranging from 10 to 80 nm. Scanning tunnelling microscopy was used to study the morphology of the obtained Ag-glass surfaces and to estimate the surface roughness. An equation for the surface roughness of the thin film was evaluated using parameters related to the thin film features: the surface roughness of the substrate, the compressibility of the thin film and the film thickness. The experimental results were fitted using the evaluated equation, and the conditions favouring lower or higher surface roughness were analyzed.
将银溅射沉积在玻璃上，薄膜厚度范围为10至80纳米。使用扫描隧道显微镜研究所得银 - 玻璃表面的形态，并估计表面粗糙度。利用与薄膜特征相关的参数评估薄膜表面粗糙度的方程：基底的表面粗糙度、薄膜的可压缩性和薄膜厚度。使用评估的方程拟合实验结果，并分析有利于较低或较高表面粗糙度的条件。
