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使用扁平冲头机械探针测量分子尺度间隙中的玻璃态和粘弹性聚合物流动。

Measuring glassy and viscoelastic polymer flow in molecular-scale gaps using a flat punch mechanical probe.

作者信息

Rowland Harry D, King William P, Cross Graham L W, Pethica John B

机构信息

Department of Mechanical Science and Engineering, University of Illinois Urbana-Champaign, Urbana, Illinois 61801, USA.

出版信息

ACS Nano. 2008 Mar;2(3):419-28. doi: 10.1021/nn700211g.

DOI:10.1021/nn700211g
PMID:19206565
Abstract

This paper investigates molecular-scale polymer mechanical deformation during large-strain squeeze flow of polystyrene (PS) films, where the squeeze flow gap is close to the polymer radius of gyration (R(g)). Stress-strain and creep relations were measured during flat punch indentation from an initial film thickness of 170 nm to a residual film thickness of 10 nm in the PS films, varying molecular weight (M(w)) and deformation stress rate by over 2 orders of magnitude while temperatures ranged from 20 to 125 degrees C. In stress-strain curves exhibiting an elastic-to-plastic yield-like knee, the response was independent of M(w), as expected from bulk theory for glassy polymers. At high temperatures and long times sufficient to extinguish the yield-knee, the mechanical response M(w) degeneracy was broken, but no molecular confinement effects were observed during thinning. Creep measurements in films of 44K M(w) were well-approximated by bulk Newtonian no-slip flow predictions. For extrusions down to a film thickness of 10 nm, the mechanical relaxation in these polymer films scaled with temperature similar to Williams-Landel-Ferry scaling in bulk polymer. Films of 9000K M(w), extruded from an initial film thickness of 2R(g) to a residual film thickness of 0.5R(g), while showing stress-strain viscoelastic response similar to that of films of 900K M(w), suggestive of shear-thinning behavior, could not be matched to a constitutive flow model. In general, loading rate and magnitude influenced subsequent creep extrusion depth of high-M(w) films, with deeper final extrusions for high loading rates than for low loading rates. The measurements suggest that, for high-resolution nanoimprint lithography, mold flash or final residual film thickness can be reduced for high strain and strain rate loading of high-M(w) thin films.

摘要

本文研究了聚苯乙烯(PS)薄膜在大应变挤压流动过程中的分子尺度聚合物机械变形,其中挤压流动间隙接近聚合物的回转半径(R(g))。在PS薄膜的平压头压痕过程中测量了应力-应变和蠕变关系,从初始膜厚170nm到残余膜厚10nm,改变分子量(M(w))和变形应力速率超过2个数量级,同时温度范围为20至125摄氏度。在呈现出类似弹性到塑性屈服拐点的应力-应变曲线中,响应与M(w)无关,这与玻璃态聚合物的本体理论预期一致。在高温和足够长的时间足以消除屈服拐点时,机械响应的M(w)简并性被打破,但在薄膜变薄过程中未观察到分子限制效应。44K M(w)薄膜的蠕变测量结果与本体牛顿无滑移流动预测结果非常接近。对于挤压至10nm膜厚的情况,这些聚合物薄膜中的机械松弛与温度的关系类似于本体聚合物中的威廉姆斯-兰德尔-费里标度。从初始膜厚2R(g)挤压至残余膜厚0.5R(g)的9000K M(w)薄膜,虽然显示出与900K M(w)薄膜类似的应力-应变粘弹性响应,暗示了剪切变稀行为,但无法与本构流动模型相匹配。一般来说,加载速率和大小会影响高M(w)薄膜随后的蠕变挤压深度,高加载速率下的最终挤压深度比低加载速率下更深。这些测量结果表明,对于高分辨率纳米压印光刻,对于高M(w)薄膜的高应变和应变率加载,可以减少模具飞边或最终残余膜厚。

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