Avendaño-Alejo Maximino, Moreno-Oliva Victor I, Campos-García Manuel, Díaz-Uribe Rufino
Centro de Ciencias Aplicadas y Desarrollo Tecnológico, Universidad Nacional Autónoma de México,Apdo. Postal 70-186, México City 04510, D.F. México.
Appl Opt. 2009 Feb 10;48(5):1008-15. doi: 10.1364/ao.48.001008.
We report the testing of a fast off-axis surface based on the null screen principles. Here we design a tilted null screen with drop shaped spots drawn on it in such a way that its image, which is formed by reflection on the test surface, becomes an exact square array of circular spots if the surface is perfect. Any departure from this geometry is indicative of defects on the surface. Here the whole surface is tested at once. The test surface has a radius of curvature of r = 20.4 mm (F/0.206). The surface departures from the best surface fit are shown; in addition, we show that the errors in the surface shape are below 0.4 mum when the errors in the determination of the coordinates of the centroids of the reflected images are less than 1 pixel, and the errors in the coordinates of the spots of the null screen are less than 0.5 mm.
我们报告了基于零位屏原理的快速离轴表面测试。在此，我们设计了一个倾斜的零位屏，上面绘制有水滴状光斑，使得其在测试表面反射形成的图像，若表面完美，则会成为圆形光斑的精确正方形阵列。与这种几何形状的任何偏差都表明表面存在缺陷。在此，整个表面一次性进行测试。测试表面的曲率半径为r = 20.4毫米（F/0.206）。展示了表面相对于最佳表面拟合的偏差；此外，我们表明，当反射图像质心坐标测定误差小于1像素，且零位屏光斑坐标误差小于0.5毫米时，表面形状误差低于0.4微米。
