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使用细晶粒PZT基压电陶瓷改善超声治疗换能器的动态特性。

The improvement of dynamic characteristics of ultrasonic therapeutic transducers using fine-grain PZT-based piezoceramics.

作者信息

Tsai Cheng-Che, Chiang Te-Kuang, Chu Sheng-Yuan

机构信息

Department of Electronic Engineering, Southern Taiwan University, Tainan, Taiwan.

出版信息

IEEE Trans Ultrason Ferroelectr Freq Control. 2009 Jan;56(1):156-66. doi: 10.1109/TUFFC.2009.1015.

Abstract

Optimizing the dynamic resonant characteristics of ultrasonic therapeutic transducers depends most importantly on fine-grain piezoceramics with good resonant properties. In this paper, we prepare and compare modified Pb(0.99)Sr(0.01)[0.03(Mn(1/3)Nb(2/3))-0.97(Zr(0.51)Ti(0.49))]O(3) piezoceramics with 0.1 wt% CaCO(3) and 0.8 wt% PbO additives (PMZT3) synthesized by B-oxides precursor (BO) and conventional ceramic mixed-oxide methods (MO). Our experimental results show that the BO-type piezoceramics have better grain microstructure and better material properties [e.g., d(33)= 340 pc/N, k(t)= 0.52, Q(m)= 1250, temperature coefficient of change rate of resonant frequency (TCF) = 0.01%/degrees C, and temperature coefficient of change rate of clamped capacitance (TCC) = 0.18%/degrees C]. We construct 1-MHz transducers using our BO and MO types of piezoceramics and examine their dynamic resonant characteristics as the transducers are driven by a power driver with open-loop control. Results show that the transducers with the BO-type piezoceramics have better dynamic characteristics, such as time stability (e.g., aging rate of resonant frequency at thickness mode = 0.26%/decade cycle, and aging rate of clamped capacitance = 0.55%/decade cycle) and temperature stability as BO-type piezoceramics. Furthermore, we observe that the clamped capacitance variation has more influence on the transducer dynamic characteristics than the resonant frequency variation, and we verify the observation from the partial derivative ratio of the transfer function derived by a simulated ultrasonic equivalent circuit system. It is concluded that the BO-type piezoceramics are better candidates than the MO-type samples for obtaining optimum dynamic resonant characteristics in ultrasonic therapeutic transducers.

摘要

优化超声治疗换能器的动态共振特性最重要的是依赖具有良好共振特性的细晶粒压电陶瓷。在本文中,我们制备并比较了通过B-氧化物前驱体(BO)法和传统陶瓷混合氧化物法(MO)合成的添加了0.1 wt%碳酸钙和0.8 wt%氧化铅的改性Pb(0.99)Sr(0.01)[0.03(Mn(1/3)Nb(2/3))-0.97(Zr(0.51)Ti(0.49))]O(3)压电陶瓷(PMZT3)。我们的实验结果表明,BO型压电陶瓷具有更好的晶粒微观结构和更好的材料性能[例如,d(33)= 340 pc/N,k(t)= 0.52,Q(m)= 1250,共振频率变化率的温度系数(TCF) = 0.01%/℃,以及夹持电容变化率的温度系数(TCC) = 0.18%/℃]。我们使用BO型和MO型压电陶瓷构建了1-MHz换能器,并在开环控制的功率驱动器驱动换能器时检查它们的动态共振特性。结果表明,采用BO型压电陶瓷的换能器具有更好的动态特性,如时间稳定性(例如,厚度模式下共振频率的老化率 = 0.26%/十年周期,夹持电容的老化率 = 0.55%/十年周期)以及与BO型压电陶瓷一样的温度稳定性。此外,我们观察到夹持电容变化对换能器动态特性的影响比共振频率变化更大,并且我们通过模拟超声等效电路系统推导的传递函数的偏导数比验证了这一观察结果。得出的结论是,在超声治疗换能器中获得最佳动态共振特性方面,BO型压电陶瓷比MO型样品更具优势。

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