Takahashi Sadayuki, Ohigashi Hiroji
Faculty of Education, Arts and Science, Yamagata University, Kojirakawa-cho 1-4-12, Yamagata 990-8560, Japan.
Ultrasonics. 2009 May;49(4-5):495-8. doi: 10.1016/j.ultras.2008.10.020. Epub 2009 Jan 12.
A reflection non-contact ultrasonic microscope system working both in amplitude and phase difference modes at 2 MHz has been developed using an air-coupled concave transducer made of piezoelectric polymer films of poly(vinylidene fluoride/trifluoroethylene) [P(VDF/TrFE)]. The transducer is composed of three 95 microm-thick P(VDF/TrFE) films stacked together, each of which is activated electrically in parallel by a driving source. The transducer has a wide aperture angle of 140 degrees and a focal length of 10mm. The measured two-way transducer insertion loss is 80 dB at 1.83 MHz. Despite 20 dB higher insertion loss than that estimated from Mason's equivalent circuit, we have obtained clear amplitude acoustic images of a coin with transverse resolution of 150 microm, and clear phase difference acoustic images of the rough surface of a paper currency bill with depth resolution of sub-micrometer. Using two planar transducers of P(VDF/TrFE), we have also successfully measured in through-transmission mode the sound velocity and absorption of a 3mm-thick silicone-rubber plate. The present study proves that, owing to its low acoustic impedance and flexibility, P(VDF/TrFE) piezoelectric film is very useful for high frequency acoustic imaging in air in the MHz range.
利用由聚(偏二氟乙烯/三氟乙烯)[P(VDF/TrFE)]压电聚合物薄膜制成的空气耦合凹面换能器,开发了一种在2MHz频率下同时工作于幅度和相位差模式的反射式非接触超声显微镜系统。该换能器由三层95微米厚的P(VDF/TrFE)薄膜堆叠而成,每层薄膜由驱动源并联电激活。换能器的孔径角为140度,焦距为10毫米。在1.83MHz频率下测得的换能器双向插入损耗为80dB。尽管插入损耗比根据梅森等效电路估算的高20dB,但我们仍获得了横向分辨率为150微米的硬币清晰幅度声学图像,以及深度分辨率为亚微米的纸币粗糙表面的清晰相位差声学图像。使用两个P(VDF/TrFE)平面换能器,我们还成功地在穿透传输模式下测量了3毫米厚硅橡胶板的声速和吸收。本研究证明,由于其低声阻抗和柔韧性,P(VDF/TrFE)压电薄膜对于MHz范围内空气中的高频声学成像非常有用。