Yin Li-yong, Wen Xiao-qiong, Wang De-zhen
State Key Laboratory for Materials Modification by Laser, Ion, Electron Beams, School of Physics and Optoelectronic Technology, Dalian University of Technology, 116024, China.
Guang Pu Xue Yu Guang Pu Fen Xi. 2008 Dec;28(12):2745-8.
Optical emission spectroscopy method was used to diagnose the normal dc glow discharge plasma generated inside a metallic tube. The active species in the plasma were identified. The electron excitation temperature in the plasma was determined by the Boltzmann plot method. The vibrational temperature of N2 molecules in the plasma was determined by analyzing the emission spectrum lines of the N2 second positive system (C3 IIu-->B 3IIg). The dependence of the electron excitation temperature and molecular vibrational temperature on the pressure was investigated. The experiment results show that in the Ar 60% + N2 40% glow discharge plasma at 20 Pa, the active species are the Ar atoms, Ar ions, second positive series of N transitions and theE first negative series of B (2)II2u-->X 2sigma g+; transitons; the electron excitation temperature is (15 270 +/- 250) K, and the vibrational temperature of N2 molecules is (3 290 +/- 100) K. The electron excitation temperature and molecular vibrational temperature decrease with increasing pressure. These results would give some valuable guide to the study on inner surface modification of metallic tubes.
采用光发射光谱法对金属管内产生的正常直流辉光放电等离子体进行诊断。识别了等离子体中的活性物种。用玻尔兹曼绘图法测定了等离子体中的电子激发温度。通过分析N2第二正系统（C3 IIu→B 3IIg）的发射光谱线，确定了等离子体中N2分子的振动温度。研究了电子激发温度和分子振动温度对压力的依赖性。实验结果表明，在20 Pa的Ar 60%+N2 40%辉光放电等离子体中，活性物种为Ar原子、Ar离子、N跃迁的第二正系列以及B（2）II2u→X 2sigma g+的第一负系列跃迁；电子激发温度为（15270±250）K，N2分子的振动温度为（3290±100）K。电子激发温度和分子振动温度随压力升高而降低。这些结果将为金属管内表面改性研究提供一些有价值的指导。
