Jalkanen Tero, Torres-Costa Vicente, Salonen Jarno, Björkqvist Mikko, Mäkilä Ermei, Martínez-Duart Jose Manuel, Lehto Vesa-Pekka
Department of Physics, University of Turku, Turku, Finland.
Opt Express. 2009 Mar 30;17(7):5446-56. doi: 10.1364/oe.17.005446.
In the present work, porous silicon (PS) based Bragg reflectors are fabricated, and the reactive PS surface is passivated by means of thermal carbonization (TC) by acetylene decomposition. The gas sensing properties of the reflectors are studied with different gas compositions and concentrations. Based on the results it can be concluded that thermally carbonized Bragg reflectors provide an easy and inexpensive means to produce chemically stable high quality PS reflectors with good gas sensing properties, which differ from those of unpassivated PS reflectors.
在本工作中，制备了基于多孔硅（PS）的布拉格反射器，并通过乙炔分解的热碳化（TC）对活性PS表面进行钝化。研究了反射器在不同气体成分和浓度下的气敏特性。基于这些结果可以得出结论，热碳化布拉格反射器提供了一种简单且廉价的方法来制备具有良好气敏特性的化学稳定的高质量PS反射器，这与未钝化的PS反射器不同。
