Kim Dae Wook, Park Won Hyun, Kim Sug-Whan, Burge James H
College of Optical Sciences, University of Arizona, Tucson, Arizona 85721, USA.
Opt Express. 2009 Mar 30;17(7):5656-65. doi: 10.1364/oe.17.005656.
Computer controlled polishing requires accurate knowledge of the tool influence function (TIF) for the polishing tool (i.e. lap). While a linear Preston's model for material removal allows the TIF to be determined for most cases, nonlinear removal behavior as the tool runs over the edge of the part introduces a difficulty in modeling the edge TIF. We provide a new parametric model that fits 5 parameters to measured data to accurately predict the edge TIF for cases of a polishing tool that is either spinning or orbiting over the edge of the workpiece.
