载气在射频放电中产生亚稳态氩原子过程中的作用。

The role of carrier gases in the production of metastable argon atoms in a rf discharge.

作者信息

Rudinger Kenneth, Lu Zheng-Tian, Mueller Peter

机构信息

Physics Division, Argonne National Laboratory, Argonne, Illinois 60439, USA.

出版信息

Rev Sci Instrum. 2009 Mar;80(3):036105. doi: 10.1063/1.3105722.

DOI:10.1063/1.3105722

PMID:19334960

Abstract

We investigate the role of carrier gases in the production of metastable argon atoms in a rf-driven discharge. The effects of different carrier gases (krypton, xenon, neon, and helium), carrier gas pressures, and rf discharge powers are examined. A xenon carrier gas provides the greatest metastable population of argon, yielding an optimal fractional metastable population of argon (Ar(*)/Ar) of 2x10(-4) at 0.2 mTorr of xenon gas. The optimal krypton configuration yields 60% of the xenon-supported population at 1.5 times higher pressure. Neon and helium perform considerably worse probably due to their higher ionization potentials.

摘要

我们研究了载气在射频驱动放电中产生亚稳态氩原子的作用。考察了不同载气（氪、氙、氖和氦）、载气压力和射频放电功率的影响。氙载气能使氩的亚稳态粒子数达到最多，在0.2毫托的氙气压力下，氩的最佳亚稳态粒子分数（Ar(*)/Ar）为2×10⁻⁴。最佳氪配置在压力高出1.5倍时产生的粒子数为氙载气支持下粒子数的60%。氖和氦的表现要差得多，这可能是由于它们较高的电离势。