Chang Yi-Kuei, Hong Franklin Chau-Nan
Department of Chemical Engineering, National Cheng Kung University, Tainan, Taiwan, Republic of China.
Nanotechnology. 2009 Jun 10;20(23):235202. doi: 10.1088/0957-4484/20/23/235202. Epub 2009 May 18.
Zinc oxide nanowire field-effect transistors (NW-FETs) were fabricated combining the dielectrophoresis (DEP) and the hot-pressing methods. DEP was used to position both ends of the nanowires on top of the source and the drain electrodes, respectively. Hot-pressing of nanowires on the electrodes was then employed to ensure good contacts between the nanowires and the electrodes. The good device performance achieved with our method of fabrication indicates that DEP combined with hot-pressing has the potential to be applied to the fabrication of flexible electronics on a roll-to-roll basis.
结合介电泳(DEP)和热压方法制备了氧化锌纳米线场效应晶体管(NW-FET)。DEP用于将纳米线的两端分别定位在源极和漏极电极的顶部。然后对电极上的纳米线进行热压,以确保纳米线与电极之间有良好的接触。我们的制造方法所实现的良好器件性能表明,DEP与热压相结合有潜力应用于卷对卷柔性电子器件的制造。