Dobrowolski J, Ford Joseph, Sullivan Brian, Lu Liping, Osborne Norman
Opt Express. 2004 Dec 13;12(25):6258-69. doi: 10.1364/opex.12.006258.
Conducting optical coatings for the visible light range are commonly made of Indium Tin Oxide (ITO), but ITO is unsuitable for near-infrared telecommunications wavelengths because it can become absorptive after extended illumination. In this paper we show an alternative approach which uses conventional coating materials to create either non-conducting or conducting antireflection (AR) coatings that are effective over a fairly broad spectral region ( lambdalong/lambdashort approximately 1.40) and also usable for a wide range of angles of incidence (0-38 masculine, or 0-55 masculine) in the telecom wavelength range. Not only is the transmittance of windows treated with such coatings quite high, but they can be made to have extreme polarization independence (low polarization dependent loss values). A number of such coating designs are presented in the paper. A prototype of one of the conducting AR coating designs was fabricated and the measurements were found to be in reasonable agreement with the calculated performance. Such AR coatings should be of interest for telecommunication applications and especially for anti-static hermetic packaging of MEMS devices such as optical switches.
用于可见光范围的光学涂层通常由氧化铟锡(ITO)制成,但ITO不适用于近红外电信波长,因为在长时间照明后它会变得具有吸收性。在本文中,我们展示了一种替代方法,该方法使用传统涂层材料来创建非导电或导电抗反射(AR)涂层,这些涂层在相当宽的光谱区域(λ长/λ短约为1.40)内有效,并且在电信波长范围内也可用于广泛的入射角(0 - 38°,或0 - 55°)。用这种涂层处理过的窗口不仅透射率相当高,而且可以使其具有极高的偏振独立性(低偏振相关损耗值)。本文介绍了许多这样的涂层设计。制造了一种导电AR涂层设计的原型,发现测量结果与计算性能合理相符。这种AR涂层对于电信应用,特别是对于诸如光开关等MEMS器件的抗静电密封包装应该是有意义的。