Cao Zhaoliang, Xuan Li, Hu Lifa, Liu Yongjun, Mu Quanquan, Li Dayu
Opt Express. 2005 Feb 21;13(4):1059-65. doi: 10.1364/opex.13.001059.
We illustrate that the phase-only liquid crystal spatial light modulator (LC SLM) can be used for optical testing. The large phase change and the phase modulation precision are discussed. The computer generated holograms (CGH) method is used to acquire the significant phase modulation. And the phase modulating characteristics of the LC SLM are measured. It shows the phase modulation depth is more than 2pi and the modulation precision is down to 1/14lambda (PV) and 1/100lambda (rms) (lambda=632.8nm). In order to verify this method, the former surface of a convex lens is tested by ZYGO interferometer. The parallel straight fringes are obtained. It is shown that PV is 1/3lambda and rms is 1/20lambda after compensated by the LC SLM.
我们证明了纯相位液晶空间光调制器（LC SLM）可用于光学测试。讨论了其大的相位变化和相位调制精度。采用计算全息图（CGH）方法来获得显著的相位调制。并测量了LC SLM的相位调制特性。结果表明，相位调制深度大于2π，调制精度低至1/14λ（峰谷值）和1/100λ（均方根值）（λ = 632.8nm）。为了验证该方法，用ZYGO干涉仪对一个凸透镜的前表面进行了测试。获得了平行直条纹。结果表明，经LC SLM补偿后，峰谷值为1/3λ，均方根值为1/20λ。
