Tekeste Meron Y, Yarrison-Rice Jan M
Opt Express. 2006 Aug 21;14(17):7931-42. doi: 10.1364/oe.14.007931.
A highly efficient design of a two-channel wavelength demultiplexer in the visible region is presented with finite-difference time-domain simulations. The design process is described in detail with particular attention to the challenges inherent in fabrication of an actual device. A 2D triangular lattice photonic crystal with 75nm air pores in a silicon nitride planar waveguide provides the confinement for visible light. The device losses due to fabrication errors such as stitching misalignment of write fields during e-beam lithography and variation in air pore diameters from etching are modeled using realistic parameters from initial fabrication runs. These simulation results will be used to guide our next generation design of high efficiency photonic crystal based demultiplexing devices.
通过时域有限差分模拟,提出了一种可见光区域的高效两通道波长解复用器设计。详细描述了设计过程,特别关注实际器件制造中固有的挑战。在氮化硅平面波导中具有75nm气孔的二维三角晶格光子晶体为可见光提供了限制。利用电子束光刻期间写入场的拼接未对准以及蚀刻导致的气孔直径变化等制造误差所导致的器件损耗,使用初始制造运行的实际参数进行建模。这些模拟结果将用于指导我们基于光子晶体的高效解复用器件的下一代设计。