Reactive ion etching of gold-nanoparticle-modified pyrolyzed photoresist films.
作者信息
Polsky Ronen, Washburn Cody M, Montano Gabriel, Liu Haiqing, Edwards Thayne L, Lopez DeAnna M, Harper Jason C, Brozik Susan M, Wheeler David R
机构信息
Department of Biosensors & Nanomaterials, Sandia National Laboratories, PO Box 5800, MS-0892, Albuquerque, NM 87185, USA.
出版信息
Small. 2009 Nov;5(22):2510-3. doi: 10.1002/smll.200901007.
PMID:19714735
Abstract
摘要
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