Measuring the cantilever-position-sensitive detector distance and cantilever curvature for cantilever sensor applications.

Measuring cantilever sensor deflections using an optical beam deflection system is more complicated than often assumed. The direction of the reflected beam is dependent on the surface normal of the cantilever, which in turn is dependent on the state of the cantilever. It is often assumed that the cantilever is both straight and perfectly level before the onset of sensing experiments although this assumption, especially the former, is rarely true. Failure to characterize the initial state of the cantilever can lead to irreproducibility in cantilever sensor measurements. We have developed three new methods for characterizing the initial state of the cantilever. In the first case we show how to define the initial angle of inclination beta of the chip on which the cantilever is attached. This method was tested using an aluminum block with a known angle of inclination. A new method for determining the initial distance L(o) between the cantilever and the position-sensitive detector (PSD) is also presented. This parameter which behaves as an amplification factor of the PSD signal is critical for obtaining precise cantilever sensor data. Lastly, we present a method for determining the initial curvature of the cantilever which often results from depositing the sensing platform on the lever. Experiments conducted using deflected cantilevers showed the model to be accurate. The characterization methods presented in this work are simple to use, easy to implement, and can be incorporated into most cantilever sensor setups.