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使用拉伸聚二甲基硅氧烷复制模具控制胶体晶体图案的形状和特征尺寸。

Shape and feature size control of colloidal crystal-based patterns using stretched polydimethylsiloxane replica molds.

机构信息

Department of Chemical & Biomolecular Engineering (BK 21 Graduate Program), Korea Advanced Institute of Science and Technology(KAIST), 335 Gwahangno, Yuseong-gu, Daejeon, 305-701 Republic of Korea.

出版信息

Langmuir. 2009 Oct 20;25(20):12011-4. doi: 10.1021/la902982y.

Abstract

In this work, we fabricated various patterns using colloidal crystals as master molds via the soft lithography method. Even though colloidal crystals consist of spherical colloidal particles, nonspherical shaped patterns such as rectangular or elongated hexagonal shaped patterns can be fabricated using a stretched polydimethylsiloxane (PDMS) replica mold. The pattern shape and feature size can be easily controlled by changing the stretching axis and ratio of the PDMS replica mold. The deformations of the PDMS mold were simulated using the finite element method, and they are consistent with experimental results. The elongated patterns were used as templates to offer new types of colloidal crystal superlattice structures. A proposed pattern-control method will significantly expand the usefulness and diversity of micro/nanopatterning technology.

摘要

在这项工作中,我们使用胶体晶体作为母模,通过软光刻的方法制造了各种图案。尽管胶体晶体由球形胶体颗粒组成,但使用拉伸的聚二甲基硅氧烷(PDMS)复制模具可以制造出非球形的图案,如矩形或拉长的六边形形状的图案。通过改变 PDMS 复制模具的拉伸轴和比例,可以轻松地控制图案形状和特征尺寸。使用有限元法对 PDMS 模具的变形进行了模拟,其结果与实验结果一致。拉长的图案被用作模板,提供了新型的胶体晶体超晶格结构。所提出的图案控制方法将显著扩展微/纳米图案化技术的用途和多样性。

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