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使用无碎片的飞秒激光驱动的基于团簇的等离子体软X射线源和LiF晶体探测器对纳米结构图像进行基于传播的相衬增强。

Propagation-based phase-contrast enhancement of nanostructure images using a debris-free femtosecond-laser-driven cluster-based plasma soft x-ray source and an LiF crystal detector.

作者信息

Pikuz Tatiana A, Faenov Anatoly Ya, Gasilov Sergei V, Skobelev Igor Yu, Fukuda Yuji, Kando Masaki, Kotaki Hideyuki, Homma Takayuki, Kawase Keigo, Hayashi Yukio, Kawachi Tetsuya, Daido Hiroyuki, Kato Yoshiaki, Bulanov Sergei V

机构信息

Kansai Photon Science Institute (KPSI), Japan Atomic Energy Agency (JAEA), Kizugawa-shi, Kyoto, Japan.

出版信息

Appl Opt. 2009 Nov 10;48(32):6271-6. doi: 10.1364/AO.48.006271.

Abstract

We demonstrate in-line phase-contrast imaging of nanothickness foils by using a relatively large, polychromatic, debris-free femtosecond-laser-driven cluster-based plasma soft x-ray source, and a high-resolution, large dynamic range LiF crystal detector. The spatial coherence length of radiation in our setup reached a value of 5 microm on the sample plane, which is enough to observe phase-contrast enhancement in the images registered by the detector placed only a few hundred micrometers behind the object. We have developed a tabletop soft x-ray emission source, which emits radiation within a 4pi sr solid angle, and which allows one to obtain contact and propagation-based phase-contrast imaging of nanostructures with 700 nm spatial resolutions. This advance could be of utility for metrology applications.

摘要

我们利用一个相对较大的、多色的、无碎片的飞秒激光驱动的基于团簇的等离子体软X射线源以及一个高分辨率、大动态范围的LiF晶体探测器,展示了纳米厚度箔片的在线相衬成像。我们装置中辐射的空间相干长度在样品平面上达到了5微米的值,这足以在仅放置在物体后方几百微米处的探测器所记录的图像中观察到相衬增强。我们开发了一种桌面型软X射线发射源,它在4π sr立体角内发射辐射,并且能够以700纳米的空间分辨率获得纳米结构的接触式和基于传播的相衬成像。这一进展可能对计量学应用有用。

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