倾斜表面上的空间相干轮廓测量法。

Spatial coherence profilometry on tilted surfaces.

作者信息

Pavlicek Pavel, Halouzka Marek, Duan Zhihui, Takeda Mitsuo

机构信息

Joint Laboratory of Optics of Palacky University, Institute of Physics of the Academy of Sciences of the Czech Republic, Tr. 17 listopadu 50a, CZ-772 07 Olomouc, Czech Republic.

出版信息

Appl Opt. 2009 Dec 1;48(34):H40-7. doi: 10.1364/AO.48.000H40.

DOI:10.1364/AO.48.000H40

PMID:19956300

Abstract

The influence of tilted surfaces on the measurement of shape by spatial coherence profilometry is investigated. Based on theoretical analysis and experimental results, the systematic measurement error caused by surface tilt is determined. The systematic measurement error depends not only on the tilt angle but also on the parameters of the experimental setup. The theoretical analysis and the experiments show the similarities and differences between spatial coherence profilometry and white-light interferometry. We also suggest the conditions to obtain correct measurements by use of spatial coherence profilometry.

摘要

研究了倾斜表面对空间相干轮廓术形状测量的影响。基于理论分析和实验结果，确定了由表面倾斜引起的系统测量误差。该系统测量误差不仅取决于倾斜角度，还取决于实验装置的参数。理论分析和实验表明了空间相干轮廓术与白光干涉测量法之间的异同。我们还提出了使用空间相干轮廓术获得正确测量结果的条件。