Egloff Thomas, Knobbe Jens, Sinzinger Stefan, Grüger Heinrich
Business Unit Sensor and Actuator Systems, Fraunhofer Institute for Photonic Microsystems, Maria-Reiche-Strasse 2, 01109 Dresden, Germany.
Appl Opt. 2009 Dec 1;48(34):6583-93. doi: 10.1364/AO.48.006583.
We present the development of an imaging spectrometer for the near infrared (NIR) using a micro-opto-electromechanical system. A diffraction grating has been etched into the surface of a micromechanical scanning mirror made of silicon and is used to scan the object space and to disperse the NIR radiation simultaneously. Beginning with the specific requirements of NIR hyperspectral imaging, a detailed analysis of the system approach resulting in an all-reflective optical design for the hyperspectral imager is presented. The investigation includes a thorough consideration of spectral and spatial distortion occurring by scanning the scene with a grating. Minimization of these aberrations leads to an improved spectrometer design.
我们展示了一种使用微机电系统开发的近红外（NIR）成像光谱仪。衍射光栅已蚀刻在由硅制成的微机械扫描镜表面，用于扫描物空间并同时分散近红外辐射。从近红外高光谱成像的特定要求出发，对系统方法进行了详细分析，得出了高光谱成像仪的全反射光学设计。该研究包括对用光栅扫描场景时出现的光谱和空间畸变的全面考虑。将这些像差最小化可改进光谱仪设计。
