Institute for Semiconductor and Solid State Physics, Johannes Kepler University, A-4040 Linz, Austria.
Opt Lett. 2009 Dec 15;34(24):3785-7. doi: 10.1364/OL.34.003785.
This work demonstrates a rib waveguide photodetector based on a vertical Si p-i-n junction with Ge islands operating in the spectral region around lambda=1.55 microm at room temperature. A vertical stack of four layers of Ge islands is grown by molecular beam epitaxy on a silicon-on-insulator. Each layer is organized in a two-dimensional square grid with a period of 460 nm. The spectral response of the detector extends well beyond 1.6 mum at 300 K. The absorption length of approximately 135 microm (at 1/e decrease of intensity) at lambda=1.55 microm along the waveguide allows for relatively small-size devices for all-on-one-platform integration.
本工作展示了一种基于垂直 Si p-i-n 结的脊形波导光电探测器,该探测器带有在室温下工作于约 1.55μm 波长的 Ge 岛。通过分子束外延在绝缘体上硅衬底上生长了四层 Ge 岛的垂直堆叠。每个层都以 460nm 的周期组织成二维正方形网格。探测器的光谱响应在 300K 时远远超过 1.6μm。在 λ=1.55μm 时,沿波导的吸收长度约为 135μm(强度降低 1/e),允许用于全平台集成的相对小尺寸器件。