硫族化物玻璃光子晶体波导的制备与表征

Fabrication and characterization of chalcogenide glass photonic crystal waveguides.

作者信息

Suzuki Keijiro, Hamachi Yohei, Baba Toshihiko

机构信息

Department of Electrical and Computer Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya-ku, Yokohama, 240-8501, Japan.

出版信息

Opt Express. 2009 Dec 7;17(25):22393-400. doi: 10.1364/OE.17.022393.

DOI:10.1364/OE.17.022393

PMID:20052163

Abstract

We report on the fabrication of chalcogenide glass (Ag-As(2)Se(3)) photonic crystal waveguides and the first detailed characterization of the linear and nonlinear optical properties. The waveguides, fabricated by e-beam lithography and ICP etching exhibit typical transmission spectra of photonic crystal waveguides, and exhibit high optical nonlinearity. Nonlinear phase shift of 1.5pi through self-phase modulation is observed at 0.78 W input peak power in a 400 microm long device. The effective nonlinear parameter gamma(eff) estimated from this result reaches 2.6 x 10(4) W(-1)m(-1). Four-wave mixing is also observed in the waveguide, while two-photon absorption at optical communication wavelengths is sufficiently small and the corresponding figure of merit is larger than 11.

摘要

我们报道了硫族化物玻璃（Ag - As₂Se₃）光子晶体波导的制备以及对其线性和非线性光学性质的首次详细表征。通过电子束光刻和电感耦合等离子体蚀刻制造的波导呈现出光子晶体波导的典型传输光谱，并表现出高光非线性。在一个400微米长的器件中，当输入峰值功率为0.78瓦时，通过自相位调制观察到1.5π的非线性相位 shift。根据该结果估算的有效非线性参数γeff达到2.6×10⁴W⁻¹m⁻¹。在波导中还观察到了四波混频，而在光通信波长处的双光子吸收足够小，相应的品质因数大于11。