Huang Nien-Tsu, Truxal Steven C, Tung Yi-Chung, Hsiao Amy, Takayama Shuichi, Kurabayashi Katsuo
Appl Phys Lett. 2009 Nov 23;95(21):211106. doi: 10.1063/1.3267083. Epub 2009 Nov 24.
We report on a microelectromechanical tunable optical filter incorporating strain-tunable nanoimprinted elastomeric grating with a pitch varied by 18%. This device enables tuning of optical fiber-guided laser wavelength between lambda=473 and 532 nm within 0.5 ms by mechanically modulating the pitch with a silicon microactuator. We also demonstrate the use of the device for obtaining two-color images of livedead-stained cells with the color intensity ratio varied by the actuator voltage applied. The small structure of the device integrated on a silicon chip may be used in portable systems for optical switching and spectroscopy.
我们报道了一种微机电可调谐光学滤波器，它集成了应变可调纳米压印弹性体光栅，其间距变化了18%。该器件通过用硅微致动器机械调制间距，能够在0.5毫秒内将光纤引导的激光波长调谐到λ=473至532纳米之间。我们还展示了该器件用于获取活死细胞染色的双色图像，其颜色强度比随施加的致动器电压而变化。集成在硅芯片上的该器件的小结构可用于便携式光学开关和光谱系统。
