极紫外连续放电线源

Continuous discharge line source for the extreme ultraviolet.

作者信息

Paresce F, Kumar S, Bowyer C S

出版信息

Appl Opt. 1971 Aug 1;10(8):1904-8. doi: 10.1364/AO.10.001904.

DOI:10.1364/AO.10.001904

PMID:20111225

Abstract

A continuous gaseous discharge source suitable for use between 100 A and 1000 A is described. The source is stable, produces little or no electromagnetic interference, and is rich in high intensity lines throughout the extreme uv. The operating characteristics of this source and its spectral output with various gases are presented.

摘要

描述了一种适用于100安至1000安之间的连续气体放电源。该源稳定，产生极少或不产生电磁干扰，并且在整个极紫外波段富含高强度谱线。介绍了该源的运行特性及其在各种气体下的光谱输出。