Saito T T, Simmons L B
Appl Opt. 1974 Nov 1;13(11):2647-50. doi: 10.1364/AO.13.002647.
Single point diamond knives have been used to machine to microinch tolerances. This micromachining can also produce optics of high quality. Optical micromachining capabilities in terms of materials, shapes, and optical figure are discussed. Comparisons are made between micromachined mirrors and superpolished surfaces including reflectivity, absorption, scatter, roughness, autocorrelation length, and Nomarski microscopy. 10.6-microm pulsed damage data and preliminary 10.6-microm cw damage investigations are also reported. Micromachined well with superpolished samples.
单点金刚石刀具已被用于加工达到微英寸公差。这种微加工也能生产出高质量的光学元件。本文讨论了在材料、形状和光学外形方面的光学微加工能力。对微加工镜面与超抛光表面进行了比较,包括反射率、吸收率、散射、粗糙度、自相关长度和诺马斯基显微镜观察。还报告了10.6微米脉冲损伤数据和初步的10.6微米连续波损伤研究。微加工与超抛光样品效果良好。