Aspnes D E
Appl Opt. 1975 May 1;14(5):1131-6. doi: 10.1364/AO.14.001131.
The theoretical precision attainable from a number of types of ideal null and photometric ellipsometers is investigated quantitatively. Photometric and modulated null ellipsometer systems are shown to be approximately comparable with respect to precision when operating under shot-noise limited conditions. Differences are due principally to intrinsic detector noise levels, which are more significant in null designs. The equations derive can be used to estimate practical measurement limits or to choose components to achieve a specific objective.
对多种类型的理想零位和光度椭圆偏振仪可达到的理论精度进行了定量研究。结果表明，在散粒噪声限制条件下运行时，光度和调制零位椭圆偏振仪系统在精度方面大致相当。差异主要归因于探测器的固有噪声水平，这在零位设计中更为显著。推导得出的方程可用于估计实际测量极限或选择组件以实现特定目标。
