State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, JilinUniversity, 2699 Qianjin Street, Changchun 130012, China.
Opt Lett. 2010 Feb 15;35(4):580-2. doi: 10.1364/OL.35.000580.
Electro-optic probing of electric fields has been considered as a promising approach for integrated circuit diagnosis. However, the method is subject to relatively weak voltage sensitivity. In this Letter, we solve the problems with electro-acoustic effect. In contrast to the general electro-optic effect, the light phase modulation induced by the acoustic effect is 2 orders of magnitude stronger at its resonant frequency, as we observed in a GaAs thin film probe. Furthermore, this what we believe to be a novel method shows a highly reproducible linearity between the detected signals and the input voltages, which facilitates the voltage calibration.
电光探测电场一直被认为是集成电路诊断的一种很有前途的方法。然而，该方法的电压灵敏度相对较弱。在本信中，我们解决了电声效应的问题。与一般的电光效应相比，在 GaAs 薄膜探针中观察到，在其共振频率下，声效应引起的光相位调制要强 2 个数量级。此外，我们认为这种新方法在检测信号与输入电压之间表现出高度可重复的线性关系，这有利于电压校准。
