Tan Jiubin, Wang Fei, Cui Jiwen
Ultra-precision Optoelectronic Instrument Engineering Center, PO Box 3018, Harbin Institute of Technology, Harbin 150080, PR China.
Opt Express. 2010 Feb 1;18(3):2925-33. doi: 10.1364/OE.18.002925.
In order to improve the low displacement sensitivity in sensing the 2D deflection of a fiber probe used for measurement of micro cavities with high aspect ratio, a fiber stem with a ball mounted on its end is used as a probe and a small segment of it is used as a cylindrical lens to collimate a point light source and image it to a camera. The deflection of the fiber stem can be inferred from the change in image acquired by the camera with ultrahigh displacement sensitivities of 10,000 and 20,000 in two dimensions using a fiber stem of 44 mum in diameter, and the corresponding resolutions are better than 1 nm and 3 nm respectively.
为了提高用于测量高纵横比微腔的光纤探针二维偏转传感中的低位移灵敏度，将一端装有球的光纤杆用作探针，并将其一小段用作柱面透镜来准直点光源并将其成像到相机上。使用直径为44μm的光纤杆，可从相机采集的图像变化中推断出光纤杆的偏转，在二维中具有10000和20000的超高位移灵敏度，相应分辨率分别优于1nm和3nm。
