Smolka F M, Caudell T P
Appl Opt. 1978 Oct 15;17(20):3284-9. doi: 10.1364/AO.17.003284.
A noncontact method for measuring the surface profile of a reflecting surface is presented. The scheme is based on the measurement of the phase difference between a surface reflected laser beam and a reference beam. Both beams are scanned past a photodetector by means of a rotating beam splitter. The slope of the surface at various points is electronically obtained, and then the surface profile in a plane is determined by direct integration. The accuracy of the method falls between the more elaborate interferometric techniques and mechanical contact schemes. A complete theoretical analysis of the method is presented as well as the results of various experimental tests.
提出了一种用于测量反射表面轮廓的非接触式方法。该方案基于测量表面反射激光束与参考光束之间的相位差。两束光都通过旋转分束器扫描经过一个光电探测器。通过电子方式获得表面各点的斜率，然后通过直接积分确定平面内的表面轮廓。该方法的精度介于更精密的干涉测量技术和机械接触测量方案之间。给出了该方法的完整理论分析以及各种实验测试的结果。
