Extreme ultraviolet reflection efficiencies of diamond-turned aluminum, polished nickel, and evaporated gold surfaces.

We report measurements of reflection efficiencies from 44 A to 1048 A for samples of polished nickel, diamond-turned aluminum, and various thicknesses of gold evaporated onto the nickel and aluminum samples. The reflection efficiencies are presented for grazing angles from 5 degrees to 75 degrees . For wavelengths longer than ~100 A, the gold-coated nickel surface provides the highest efficiencies, while for wavelengths shorter than 100 A the nickel is superior. The optimal thickness of gold is found to be ~500 A. The performance of grazing incidence optics using nickel and aluminum substrates for an evaporated gold surface is discussed.